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AMAT Application Material 0021-35008 Reflector 200mm

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AMAT semiconductor application reflectors are often used in conjunction with semiconductor manufacturing equipment such as thin film deposition systems, chemical vapor deposition (CVD) equipment, and plasma etching equipment. The main function of the reflector is to reflect and focus the beam, ensuring that the light energy is effectively used in the complex process, thereby improving the overall performance of the device and the production quality of the semiconductor chip.

AMAT Application Material 0021-35008 Reflector 200mm

AMAT semiconductor application reflectors are often used in conjunction with semiconductor manufacturing equipment such as thin film deposition systems, chemical vapor deposition (CVD) equipment, and plasma etching equipment. The main function of the reflector is to reflect and focus the beam, ensuring that the light energy is effectively used in the complex process, thereby improving the overall performance of the device and the production quality of the semiconductor chip.

AMAT Application Material 0021-35008 Reflector 200mm

Parameter action

1 reflectivity ‌ :
– Action ‌ : High reflectivity ensures that more light is reflected back to the process area, reducing light energy loss.
‌- Importance ‌ : The level of reflectivity directly affects the energy efficiency and production quality of the equipment.

2 Heat resistance ‌ :

‌- Action ‌ : During semiconductor manufacturing, the internal temperature of the device can be extremely high. The reflector needs to have good heat resistance to ensure stable performance in high temperature environments.
‌- Importance ‌ : Insufficient heat resistance may lead to deformation or damage of the reflector, which will affect the normal operation of the equipment and the production quality of the semiconductor chip.

3 Surface roughness ‌ :

‌- action ‌ : The surface roughness of the reflector has an important effect on its reflection performance. The smoother the surface, the better the reflection.
‌- Importance ‌ : High surface roughness may result in increased light scattering and reduced reflection efficiency, thus affecting the overall performance of the device.

Reflector Plate 300mm 0040-63694/0040-44027
Reflector Plate 200mm BPSG XE 0021-39570
2mm Saphire Probe Assembly 0010-19504/0010-23716
0021-39570,0010-19534,0020-08621,0021-03721,0040-70629,AMAT 0100-90945,AMAT 0021-84842,AMAT 0190-15779,0041-48723,0010-44213,0010-32695,0190-01431,AMAT 0190-15384,AMAT 0200-00672,0190-72680,0200-00672,0100-09145,0010-23716

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