ZMI 2000 System ZMI-2002 8020-0211 Measurement Boards

ZMI 2000 System ZMI-2002 8020-0211 Measurement Boards

The ‌ZYGO ZMI-2002‌ 8020-0211 is a high-precision embedded measurement board designed for nanometer-scale displacement monitoring in advanced manufacturing systems. As part of ZYGO’s ZMI 2000 laser interferometry platform, this intelligent module delivers ±0.5ppm linear measurement accuracy through heterodyne laser interferometry technology. The ‌ZMI-2002‌ integrates dual-axis compensation for environmental factors including air temperature (resolution 0.01°C) and material thermal expansion, making it indispensable for semiconductor lithography equipment and ultra-precision machine tools.

Featuring 2.5GHz sampling rate and 24-bit resolution, the ‌ZYGO ZMI-2002‌ achieves real-time position feedback with <1nm repeatability. Its compact design (72×54mm) enables direct integration into motion control cabinets, replacing traditional standalone measurement systems. The board’s proprietary AirTrack™ algorithm automatically compensates for refractive index fluctuations in cleanroom environments, reducing measurement uncertainty by 60% compared to conventional solutions.

Application Areas:

The ‌ZYGO ZMI-2002‌ excels in:

‌Semiconductor manufacturing‌: EUV lithography stage positioning (ISO 14644-1 Class 1)
‌Aerospace‌: Large-scale composite material curing deformation monitoring
‌Photonics‌: Optical component surface profile measurement
‌Precision engineering‌: Coordinate measuring machine (CMM) linear axis verification

In flat panel display production, the ‌ZMI-2002‌ enables 10m-scale glass substrate alignment with 15nm positioning accuracy. Its multi-channel capability supports simultaneous X-Y-Z axis monitoring in robotic grinding systems.

Technical Specifications

Parameter Name	Parameter Value
Product Model	‌ZMI-2002‌
Manufacturer	ZYGO
Product Type	Embedded Laser Interferometry Board
Measurement Range	0-100m (single pass)
Accuracy	±0.5ppm (±0.5nm/m)
Sampling Rate	2.5GHz (4ns period)
Interface	2x SFP+ 10Gbps, 8x GPIO
Power Requirements	24V DC ±5% (15W typical)
Operating Temperature	0°C to 50°C (non-condensing)
Vibration Immunity	5g RMS (10-2000Hz)
Optical Input	633nm HeNe laser (IEC 60825-1 compliant)
Data Output	32-bit floating point @ 1MHz
Dimensions	72×54×12mm
Certifications	CE, RoHS, ISO 10110-7

Key Features and Advantages:

Sub-nanometer metrology: The ‌ZYGO ZMI-2002‌ implements differential phase detection technology that resolves 0.1nm displacement changes. Its dual-reference arm design eliminates laser frequency drift errors, maintaining <5nm/m stability over 72-hour periods.

Intelligent compensation: Built-in MEMS sensors monitor atmospheric pressure (1Pa resolution) and humidity (0.1% RH) for real-time Edlén equation calculation. The board’s environmental compensation latency of <500μs ensures synchronous correction during high-speed stage movements.

Industrial ruggedness: Gold-plated connectors and conformal-coated PCB withstand 95% relative humidity without degradation. The ‌ZMI-2002‌’s error-checking firmware detects and corrects optical misalignment within 10ms, minimizing production downtime.