ZYGO ZMI-4104 measuring electronic board
The ZYGO ZMI-4104 represents the pinnacle of laser interferometric measurement technology within the ZMI 2000 series platform. Designed for ultra-precision motion control systems, this multi-axis measurement board delivers 0.1nm resolution with ±0.5ppm linearity error across its 4-channel differential interferometer inputs. The ZMI-4104 integrates Zygo’s patented Dynamic Signal Correction (DSC) algorithm, eliminating environmental vibration interference in semiconductor lithography and nano-positioning applications.
As the flagship model in ZMI 4000 family, the ZYGO ZMI-4104 supports both HeNe laser (632.8nm) and fiber laser sources through its adaptive wavelength compensation interface. The board’s dual-redundant FPGA architecture achieves 5MHz sampling rate with <2ns channel synchronization jitter, critical for multi-axis coordinated motion systems in aerospace manufacturing.
Key Features and Advantages:
The ZYGO ZMI-4104 revolutionizes precision metrology with its Multi-Scale Averaging (MSA) technology, simultaneously providing 1pm short-term stability and 10nm long-range accuracy. Its temperature-compensated reference arm design maintains ±0.02°C thermal stability without external chillers.
Advanced diagnostics: Built-in Beam Integrity Monitoring (BIM) detects air turbulence and optical path contamination in real-time. The ZMI-4104’s web interface generates ISO 17025-compliant calibration certificates automatically, reducing metrology lab workload by 60%.
Industrial robustness: The hermetically sealed optical module withstands 95% relative humidity and 2g operational vibration. Gold-plated RF connectors ensure 10⁸ mating cycle reliability in high-duty semiconductor FAB environments.
Technical Specifications
| Parameter Name | Parameter Value |
|---|---|
| Product Model | ZMI-4104 |
| Manufacturer | ZYGO |
| Product Type | Laser Interferometer Measurement Board |
| Measurement Axes | 4 channels (X/Y/Z/θ) |
| Resolution | 0.1nm (1.58×10⁻⁶ λ) |
| Maximum Velocity | 2m/s (λ/2 sampling) |
| Wavelength Range | 400-1100nm (software configurable) |
| Data Interface | HS-USB 3.0, EtherCAT |
| Power Requirements | 24V DC ±10% (45W max) |
| Operating Temperature | 15°C-35°C (±0.01°C stability recommended) |
| Vibration Tolerance | 5µm p-p @ 1-500Hz |
| EMC Compliance | EN 61326-1:2012 |
| Dimensions | 185×135×28mm |
| Weight | 680g |
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- ZYGO ZMI-2002 8020-0211 6U VME Dual Axis Measurement Board丨ZMI 2000 System
Installation and Maintenance:
Installation preparation: Ground all optical components to the ZYGO ZMI-4104’s dedicated earth terminal (resistance <0.1Ω). Use Zygo-approved SMA torque wrenches (8-10 in-lb) for RF connector installation to prevent impedance mismatch.
Maintenance recommendations: Perform annual nitrogen purge of optical paths using Zygo P/N 900-123 cleaning kit. The ZMI-4104’s self-test routine (activated via front-panel button) verifies laser polarization stability and ADC linearity. Replace desiccant cartridges every 2,000 operational hours.
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